Exhibitor Details


Stand: 2114

Tel: +49 371 5347780
Email: info@scia-systems.com

scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for various coating and etching processes in precision optics manufacturing. We equip the optics industry with ultra-precise process equipment, for both, high volume production as well as research and development environments. Particularly noteworthy are systems for the multilayer coating of x-ray optics, optics in the visible range and optics for extreme ultraviolet lithography (EUVL). Due to their flexible and modular design, the systems can be configured according to customer specific requirements. For instance by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support. Our technology portfolio includes: Ion Beam Trimming (IBT), Ion Beam Etching/Milling (IBE/IBM), Dual Ion Beam Sputter Deposition (DIBD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Reactive Ion Etching (RIE), Magnetron Sputtering and Plasma Cleaning.

Product Categories

  • 3.01 Optical manufacturing equipment for optical systems
  • 3.05 Manufacturing technology for optical systems, other
  • 6.07 Systems for the semiconductor industry
  • 6.10 Systems for research and science
  • 6.12 Systems for sensor technology

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