Exhibitor Details

scia Systems GmbH

Stand: 4317

Tel: 3715347780
Email: info@scia-systems.com

scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for several coating and etching processes in the production of precision optics, microelectronics and MEMS, in both, high volume production as well as research and development environments. Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support. Our technology portfolio includes: • Ion Beam Trimming (IBT), • Ion Beam Etching and Milling (IBE/IBM), • Dual Ion Beam Sputtering (DIBS), • Plasma Enhanced Chemical Vapor Deposition (PECVD), • Reactive Ion Etching (RIE), • Magnetron Sputtering, • Dry Cleaning

Product Categories

  • 03.01 Optical manufacturing equipment for optical systems
  • 03.02 Optical manufacturing processes for optical systems
  • 03.05 Manufacturing technology for optical systems, other
  • 6.07 Systems for the semiconductor industry
  • 6.08 Systems for the semiconductor industry
  • 6.10 Systems for research and science
  • 6.12 Systems for sensor technology
  • 6.16 Systems for aerospace industry
  • 6.20 Systems for quantum optics

Back to Exhibitor List